Publications
Publications
- November 1991
- IEEE Transactions on Semiconductor Manufacturing
A Process Control Methodology Applied to Manufacturing GaAs MMICs
By: Rebecca M. Henderson, Peter Moran, Scott Andrew Elliott, Neil Wylie and Jesus del Alamo
Keywords
Citation
Henderson, Rebecca M., Peter Moran, Scott Andrew Elliott, Neil Wylie, and Jesus del Alamo. "A Process Control Methodology Applied to Manufacturing GaAs MMICs." IEEE Transactions on Semiconductor Manufacturing 4, no. 4 (November 1991).